D01300 - SEMI D13 - FPD用カラーフィルタの用語 Revision:SEMI D13-0708 - Superseded It is a Guide for

It is a Guide for establishing optimum electrostatic compatibility of the handling environment for reticles and other items that are extremely electrostatic sensitive (EES) to electrostatic charge

whereas infrared spectroscopy is negatively affected by the chemical state in oxygen-containing silicon

This Standard will permit the tool suppliers

1  This Practice describes calibration of scanning surface inspection system (SSIS) dark field detector channels so that the SSIS will accurately size polystyrene latex (PSL) spheres deposited on unpatterned polished

D01300 - SEMI D13 - FPD用カラーフィルタの用語 Revision:SEMI D13-0708 - Superseded It is a Guide forglobal Flat Panel Display Color Filters & Optical Elements Committee2008513global Audits and Reviews Subcommittee20086www. semi. org20087CD ROM1995200111 FPDCFCF Referenced SEMI Standards SEMI D3 Quality Area Specification for Flat Panel Display Substrates SEMI D20 Terminology for FPD Mask Defect SEMI D21 Terminology for FPD Mask Pattern Accuracy SEMI M21 Guide for Assigning Addresses to Rectangular Elements in a Cartesian Array