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SEMI E88-1101 (technical revision)
OBEM仕様を暫定版でなくするためには，以下の項目を完成しなければならない。
A change was made to correct a nonconforming title per the Procedure Manual
This Specification is intended to enable reliable and safe product authentication and traceability through systemization for the semiconductor industry
F06500 - SEMI F65 - ミリサイズのPFAチューブとともに使用するダイアフラムバルブの取付ベースの寸法仕様 Revision:SEMI F65-1101 - Inactive SEMI E88-1101 (technical revision)NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI global Liquid Chemical Distribution Systems Committee200183Japanese Regional Standards Committee20019www. semi. org200111 NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current
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