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services and behaviors described for the VPD are either required or optional for each pump type
SEMI E88-1103 (technical revision)
1 The purpose of this Standard is to standardize requirements for mixed acid etchants used in the semiconductor industry and testing procedures to support those standards
NOTICE: This Standard is no longer published with the SEMI E54 suite of Standards
E02700 - SEMI E27 - Guide for Mass Flow Controller and Mass Flow Meter Linearity Revision:SEMI E27-1017 - Superseded services and behaviors described forThe purpose of this Standard is to establish a uniform, worldwide definition of linearity in order to prevent confusion and misunderstanding between manufacturers and users of mass flow devices. A linearity specification is used to allow prediction to a known level of uncertainty, the output of a mass flow controller (MFC) at points other than those at which its output is known. The scope is to define the linearity of the MFC (controller with integral
