D05200 - SEMI D52 - Specification for Reference Position of Substrate ID StdTpc-Process Chemicals - Miscellaneous which is determined by the

which is determined by the moisture content of the component in the as-received condition

orgで入手可能となる。

This edition was approved for publication by the global Audits and Reviews Subcommittee on June 18

total thickness variation (TTV)

D05200 - SEMI D52 - Specification for Reference Position of Substrate ID StdTpc-Process Chemicals - Miscellaneous which is determined by theThis standard was technically approved by the global Flat Panel Display Factory Automation Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on May 13, 2008. It was available at www. semi. org in June 2008. E This standard was editorially modified in September 2008 to correct an error. Changes were made to 6. 1. 3 and 6. 1. 4. SEMI D32 only specifies one Bare Glass ID position, however, it is necessary to