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NOTICE: This Standard or Safety Guideline has Inactive Status because the conditions to maintain Current Status have not been met
general contractors
SEMI E78-0998 (first published)
静電気による装置動作上の問題と製品欠陥の増加は，半導体製造装置の所有コスト（COO： cost of ownership）へのマイナス要因となる（SEMI E35を参照のこと）。
E12500 - SEMI E125 - Specification for Equipment Self Description (EqSD) StdPbc-0415 NOTICE: This Standard or Safety* This Standard has the option to purchase the Current document with a redline document (Current + Redline). The redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded). If differences should exist between the redline document and the Current document, the Current version is the official and authoritative version. 1
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