E01501 - SEMI E15.1 - 300 mm装置ロードポートのための仕様 StdPbc-0220 1 This Guide provides a

1  This Guide provides a description of tools that can be used to determine these key parameters before

• extract the edge profile characteristic parameters by fitting lines or arcs to portions of the measured edge profile at defined distances from the periphery of the wafer and compare them with the specified values

E　本文書は2007年9月に，誤字を訂正するため，編集上の修正がなされた。変更箇所は，§6である。

SEMI D32 only specifies one Bare Glass ID position

E01501 - SEMI E15.1 - 300 mm装置ロードポートのための仕様 StdPbc-0220 1 This Guide provides aPhysical Interfaces & Carriers Global Technical Committee2010827global Audits and Reviews Subcommittee201010 www. semi. org199620053 NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. 300 mm 300 mm200 mmSEMI E15 Referenced SEMI Standards SEMI E1. 9 Mechanical Specification