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SEMI 3D11-1214 (Reapproved 1125)
This Test Method covers a procedure for measuring particle removal characteristic of equipment fan filter unit (EFFU) installed inside equipment
4世代と呼ばれるFPD用ガラス基板（800 × 950 × 0
1 This Specification defines metrics and calculations for reporting equipment data quality
F06200 - SEMI F62 - Test Method for Determining Mass Flow Controller Performance Characteristics for Ambient and Gas Temperature Effects StdPbc-0619 SEMI 3D11-1214 (Reapproved 1125)This Standard defines a method for testing mass flow controllers (MFCs) being considered for installation into a gas distribution system and to quantify ambient and gas temperature effects on the MFCs indicated and actual flow. This Test Method applies to metal and polymer sealed MFCs. The tests include those listed below and are to be performed in the following order: 1. Ambient Temperature Effects (Steady State and Transient) 2. Gas Temperature
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