E13000 - SEMI E130 - Specification for Prober Specific Equipment Model for 300 mm Environment (PSEM300) Revision:SEMI E130-0618 (Reapproved 0723) - Current SEMI D29-1101 (first published)

SEMI D29-1101 (first published)

SEMI C29-0301 (technical revision)

The purpose of this Test Method is to quantify a nominal average conversion factor from one gas to another for a mass flow controller (MFC) and to quantify the conversion factor as function of flow for an MFC

In this Standard

E13000 - SEMI E130 - Specification for Prober Specific Equipment Model for 300 mm Environment (PSEM300) Revision:SEMI E130-0618 (Reapproved 0723) - Current SEMI D29-1101 (first published)This Standard establishes a Prober Specific Equipment Model for prober equipment deployed in a factory adhering to the Global Joint Guidance for 300 mm Standards (PSEM300). The PSEM300 consists of equipment characteristics and behaviors that apply to this class of equipment and are required to be implemented. The intent of this Standard is to facilitate the integration of prober equipment into an automated semiconductor factory. This Standard