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C10100 - SEMI C101 - Test Method for Determining pH of Chemical Mechanical Planarization (CMP) Slurries and Related Chemicals StdPbc-0620 本安全ガイドラインは,製造装置のサービス,保守,設置,その他の装置サポートを実行する要員のEHSトレーニングに適用する。

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本安全ガイドラインは,製造装置のサービス,保守,設置,その他の装置サポートを実行する要員のEHSトレーニングに適用する。

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C10100 - SEMI C101 - Test Method for Determining pH of Chemical Mechanical Planarization (CMP) Slurries and Related Chemicals StdPbc-0620 本安全ガイドラインは,製造装置のサービス,保守,設置,その他の装置サポートを実行する要員のEHSトレーニングに適用する。This Standard will define the test method for measuring and reporting the pH of slurries and post chemical mechanical planarization (pCMP) cleaning chemicals in certificate of analysis (CoA) documents and define at what temperature the sample is measured. This Test Method will recommend the management of attainable significant figures in reporting based on current metrology capabilities. This Test Method will also recommend sample collection and

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