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SEMI E39 — Object Services Standard: Concept
SEMI G92 — Specification for Tape Frame Cassette for 450 mm Wafer
SEMI E33-0824 (technical revision)
D02700 - SEMI D27 - Guide for Flat Panel Display Equipment Communication Interfaces StdTpc-Automation Technology 98% QualityThis guide was technically approved by the global Flat Panel Display Committee and is the direct responsibility of the North American Flat Panel Display Committee. Current edition approved by the North American Regional Standards Committee on August 28, 2000. Initially available at www. semi. org August 2000; to be published October 2000. This is a guide for implementing equipment communication features for successful integration and automation in a
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