E08400 - SEMI E84 - 캐리어 핸드오프 병렬 I/O 인터페이스 강화 사양 StdPbc-0313 The output of PTM is

The output of PTM is an analysis-ready data set

as described herein

本文書はレチクルを扱う装置でのホスト・装置間通信に関する暫定スタンダードである。装置にはレチクルポッドの内外でレチクルを扱う装置だけが含まれる。

and stating result in the form of a numerical rating

E08400 - SEMI E84 - 캐리어 핸드오프 병렬 I/O 인터페이스 강화 사양 StdPbc-0313 The output of PTM isGlobal Physical Interfaces & Carriers Committee , 2009 9 4 Global Audits and Reviews Subcommittee . 1999 6 , 2007 11 . 2009 10 www. semi. org . , FOUP (open cassettes) (carrier) (AMHS) . AMHS (PI O) (control) (carrier) (handoff) ( ) . (carrier) SEMI E23 I O . (handoff), (handoff) , . (, AGV, RGV OHT AMHS ) (, ; ) (handoff) , (interbay) AMHS (, OHS ) (, OHS ) . AMHS (handoff) (carrier) I O . Figure 1 2 AHMS . (carrier) (handoff) I O : ( 6. 1) (carrier)