F05800 - SEMI F58 - Test Method for Determination of Moisture Dry-Down Characteristics of Surface-Mounted and Conventional Gas Delivery Systems by Atmospheric Pressure Ionization Mass Spectrometry (APIMS) Revision:SEMI F58-0708 - Inactive 本スタンダードは，global Physical Interfaces & Carriers

本スタンダードは，global Physical Interfaces & Carriers Committeeで技術的に承認されている。現版は2009年5月13日，global Audits and Reviews Subcommitteeにて発行が承認された。2009年6月にwww

The test may also be used for off-line characterization of Si wafers provided the requirements of the test method are met

This test method was technically approved by the Global Gases Committee and is the direct responsibility of the North American Gases Committee

This Guide defines standardized positions for measuring diameter of circular wafers of silicon and other semiconducting materials especially those processed with edge-follower edge-rounding equipment that contain flats or notches (fiducials) on the periphery

F05800 - SEMI F58 - Test Method for Determination of Moisture Dry-Down Characteristics of Surface-Mounted and Conventional Gas Delivery Systems by Atmospheric Pressure Ionization Mass Spectrometry (APIMS) Revision:SEMI F58-0708 - Inactive 本スタンダードは，global Physical Interfaces & CarriersThis standard was technically approved by the global Gases Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 13, 2008. It was available at www. semi. org in June 2008. Originally published October 2000. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from