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originally published in 1978
FPD基板が静的に保持された場合の物理的搬送に関する用語とその定義を定める。
SEMI C3 — Specification for Gases
SEMI F40 — Practice for Preparing Liquid Chemical Distribution Components for Chemical Testing
D00300 - SEMI D3 - Quality Area Specification for Flat Panel Display Substrates Revision:SEMI D3-91 (Reapproved 0709) - Inactive originally published in 1978This Standard was technically approved by the Flat Panel Display Factory Automation Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 13, 2009. Available at www. semiviews. org and www. semi. org in July 2009; originally published in 1991; previously published July 2003. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current
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