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P01200 - SEMI P12 - 誘導結合プラズマ発光分光法(ICP)によるポジティブ・フォトレジスト中の鉄,亜鉛,カルシウム,マグネシウム,銅,ホウ素,アルミニウム,クロム,マンガン,及びニッケルの測定 StdTpc-Photovoltaic 2 This Safety Guideline specifies

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Description

2  This Safety Guideline specifies the testing and criteria for determining whether a material is an ‘energetic material’ in the context of this Safety Guideline

本安全ガイドラインは,装置のライフサイクルを考慮したリスクアセスメントに適用されることを意図している。

but not limited to

resulting in meaningful system integrity verification

P01200 - SEMI P12 - 誘導結合プラズマ発光分光法(ICP)によるポジティブ・フォトレジスト中の鉄,亜鉛,カルシウム,マグネシウム,銅,ホウ素,アルミニウム,クロム,マンガン,及びニッケルの測定 StdTpc-Photovoltaic 2 This Safety Guideline specifiesNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.

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