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E14400 - SEMI E144 - 半導体製造装置および材料ハンドリング装置におけるキャリア内のRFIDタグとRFIDリーダの間の無線インタフェースの仕様 Revision:SEMI E144-0312 - Inactive 1 In this Standard

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Description

1  In this Standard

SEMI E47 — Specification for 150 mm/200 mm Pod Handles

These conversions are useful in mathematical modeling of semiconductor processing and devices

metrology methods

E14400 - SEMI E144 - 半導体製造装置および材料ハンドリング装置におけるキャリア内のRFIDタグとRFIDリーダの間の無線インタフェースの仕様 Revision:SEMI E144-0312 - Inactive 1 In this Standardglobal Physical Interfaces & Carriers Technical Committee20111224global Audits and Reviews Subcommittee20123www. semiviews. org www. semi. org2005320063 RF2006100 % 134. 2 kHzHDX RFID RFID ISO IEC 18000 02 RFID 21) RI TRP DR2B HDX MPT2) ISO IEC 18000 02 Type B (HDX) Referenced SEMI Standards None.

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