P00200 - SEMI P2 - Specification for Chrome Thin Films for Hard Surface Photomasks StdVol-Materials More complete semantics (including behavioral

More complete semantics (including behavioral constraints and collaboration patterns) for components are needed to ensure consistent interactions among components developed by separate suppliers

本仕様では，各要求条件を満たすにあたってどのマーキング手法を使用するかは規定していないが，マーキングシンボルは個々のドットをレーザで書き込むものと想定している。

SEMI D6-0623 (technical revision)

SEMI T7-0415 (technical revision)

P00200 - SEMI P2 - Specification for Chrome Thin Films for Hard Surface Photomasks StdVol-Materials More complete semantics (including behavioralNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. NOTICE: This Document was completely rewritten in 2008. This Specification covers the general requirements of the chrome thin film for hard surface photomasks. Referenced SEMI Standards SEMI P1 Specification for Hard