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SEMI E39 — Object Services Standard
SEMI M41-0600 (first published)
the producer) and many receiving devices (e
本仕様は，キャリア搬送カートとのドッキングインタフェースの設置に使用するSEMI E15
E08600 - SEMI E86 - CIMフレームワークファクトリ従業員コンポーネントに関する暫定仕様 Revision:SEMI E86-0200 - Inactive SEMI E39 — Object ServicesGlobal Information & Control CommitteeNorth American Information & Control Committee19991021North American Regional Standards Committee20001www. semi. org2000219999 SEMI E81, Provisional Specification for CIM Framework Domain ArchitectureCIM ID 2 Referenced SEMI Standards SEMI E81 Provisional Specification for CIM Framework Domain Architecture
