E09600 - SEMI E96 - Guide for CIM Framework Technical Architecture Revision:SEMI E96-1101 - Superseded variable items

variable items

This specification addresses dimensions of diaphragm valves used with metric PFA tubes except for face-to-face dimensions

SEMI F68 — Test Method for Determining Purifier Efficiency

注意：SEMI E118は2004年11月にサブドキュメントSEMI E118

E09600 - SEMI E96 - Guide for CIM Framework Technical Architecture Revision:SEMI E96-1101 - Superseded variable itemsNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Guide describes technical architecture choices that enable application components to cooperate in a computer integrated manufacturing (CIM) environment and reduce the effort required to integrate those components into