S00500 - SEMI S5 - Safety Guideline for Sizing and Identifying Flow Limiting Devices for Gases Revision:SEMI S5-0703 - Superseded To help semiconductor device manufacturers

To help semiconductor device manufacturers plan or retrofit their fabs

8-0698 (first published)

SEMI E99-1104E (Reapproved 0710)

EDAインターフェイススタンダード間の関係

S00500 - SEMI S5 - Safety Guideline for Sizing and Identifying Flow Limiting Devices for Gases Revision:SEMI S5-0703 - Superseded To help semiconductor device manufacturersThe purpose of this Safety Guideline is to provide information and methods related to flow limiting devices (FLDs) that limit the rate of release of hazardous gases during transportation, storage, and use. This Safety Guideline pertains to FLDs for hazardous gases. These devices are intended to limit the flow rate of uncontrolled releases of gases at or downstream of the FLDs. This Safety Guideline pertains to FLDs operating at critical flow rates