E01500 - SEMI E15 - Specification for Tool Load Port Revision:SEMI E15-0698E - Superseded single-path cluster tools (SPCTs)

single-path cluster tools (SPCTs)

SEMI D19-1019 (technical revision)

EQIPs may be defined for a new equipment type not previously addressed in this Standard

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E01500 - SEMI E15 - Specification for Tool Load Port Revision:SEMI E15-0698E - Superseded single-path cluster tools (SPCTs)NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Standard is intended to unify the interface between process inspection tools and automated wafer carrier transport systems while maintaining compatibility with human transport. This Specification deals with the