E16900 - SEMI E169 - Guide for Equipment Information System Security Revision:SEMI E169-0615 - Superseded start of construction

start of construction

SEMI E16-90 (first published)

with the extensive combined use of Automated Material Handling Systems (AMHS)

Make the design of user security systems easier and more robust by providing knowledge of the role and responsibility of equipment in the factory

E16900 - SEMI E169 - Guide for Equipment Information System Security Revision:SEMI E169-0615 - Superseded start of constructionThe purpose of this Standard is to establish a common basis for equipment information system security. This can be shared among users and suppliers of semiconductor manufacturing equipment, suggesting concepts, and measures of information security. This Standard is expected to: Provide guidelines of applying appropriate security measures for equipment to optimize cost, delivery, and reliability. Make the design of user security systems easier and more