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目的 － このスタンダードの目的は二つある：
and pilot-line fab locations worldwide
• Recipe identification and uniqueness control
このスタンダードは半導体の生産に使われる製造装置に適用される。
E02000 - SEMI E20 - Cluster Tool Module Interface: Electrical Power and Emergency Off Standard StdPbc-0816 目的 － このスタンダードの目的は二つある：This standard was technically approved by the global Physical Interfaces & Carriers Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on August 27, 2010. Initially available at www. semi. org in October 2010. Originally published in 1991; previously published November 2002. NOTICE: This document was balloted and approved for withdrawal in 2010. The purpose of the standard is to specify the Emergency Off
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