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SEMI F31 — Guide for Bulk Chemical Distribution Systems
This Standard does not preclude the use of Criterion-Referenced Instruction (CRI)
SEMI E63-0999 (technical revision)
it is assumed that the marking symbol will be obtained by laser marking individual dots
MF008100 - SEMI MF81 - Test Method for Measuring Radial Resistivity Variation on Silicon Wafers Revision:SEMI MF81-1105 - Superseded SEMI F31 — Guide forThe radial resistivity variation of bulk semiconductor material is an important materials acceptance requirement for semiconductor device fabrication and is also used for quality control purposes. The four point probe method provides a test that requires little specimen preparation and that is nondestructive in that the wafer is left intact. The method can be applied to wafers using the resistivity measuring apparatus and procedures of SEMI MF84 if
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