M02100 - SEMI M21 - Guide for Assigning Addresses to Rectangular Elements in a Cartesian Array StdPbc-1021 13-0698 (first published)

13-0698 (first published)

the procedure of the collection method is described in detail because it influences the reliability of measurement data and reproducibility of each facility

SEMI M74-1108 (Reapproved 1018)

1-0303 (technical revision)

M02100 - SEMI M21 - Guide for Assigning Addresses to Rectangular Elements in a Cartesian Array StdPbc-1021 13-0698 (first published)It is frequently very useful to have a standardized method for labeling elements in an array on a silicon wafer surface. This Guide defines an element addressing convention for locating and uniquely identifying rectangular elements in a Cartesian array. Such arrays are useful in locating sites for site flatness characterization, defect mapping, determination of parametric distributions, etc. on unpatterned semiconductor wafers. This Guide covers