E01905 - SEMI E19.5 - Specification for 300 mm Bottom-Opening Standard Mechanical Interface (SMIF) Revision:SEMI E19.5-0996 (Withdrawn 1103) - Withdrawn These include a generalized drawing

These include a generalized drawing of the component

本文書の目的は，半導体製造装置（SME）に関し，サプライヤ施設における最終組立と梱包，輸送，ユーザのクリーンルームの製造領域への移送と開梱に特有な活動のための標準ガイドラインを確立することである。

For measurements on transparent conducting oxide (TCO) films

SEMI S1 — Safety Guideline for Equipment Safety Labels

E01905 - SEMI E19.5 - Specification for 300 mm Bottom-Opening Standard Mechanical Interface (SMIF) Revision:SEMI E19.5-0996 (Withdrawn 1103) - Withdrawn These include a generalized drawingNOTE: SEMI E19. 5 is no longer published within the SEMI E19 family of standards. It is published and sold separately on this page. NOTICE: This document was balloted and approved for withdrawal in 2003. This standard specifies a standard interface for containers intended to control the transport environment of contained wafers. The interface must address the proper container orientation for material transfer and maintain continuity between the