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13-0698 (first published)
The scope of this Document covers high purity hafnium amides
shelf life is viewed from a quality point of view
device manufacturers can automate semiconductor factories more quickly and effectively
E08700 - SEMI E87 - Specification for Carrier Management (CMS) Revision:SEMI E87-0921 - Superseded 13-0698 (first published)* This Standard has the option to purchase the Current document with a Redline document (Current + Redline). The Redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded). If differences should exist between the Redline document and the Current document, the Current version is the official and authoritative version. 1
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