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This Document defines various areas on the pattern surface of a flat panel display substrate and describes their relationship
SEMI MF928 — Test Method for Edge Contour of Circular Semiconductor Wafers and Rigid Disk Substrates
SEMI E99-1104E (Reapproved 0710)
polarizing film
D06700 - SEMI D67 - Test Method for Antifouling Property and Chemical Resistance of FPD Polarizing Films and Its Materials Revision:SEMI D67-0819 - Superseded This Document defines various areas1 Purpose 1. 1 This Standard establishes test methods for the antifouling property and chemical resistance of FPD polarizing films and its related materials. 1. 2 These test methods can be applied in research and development, quality control and manufacturing. These test methods are also useful for research and development as well as applicability assessment of cleaning agents for the surface of FPDs. 2 Scope 2. 1 This Standard encompasses the test
