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このスタンダードは以下を期待される：
The defect terminology is reviewed and adapted where necessary
org in November 2010
• Equipment recipe components and recipe steps contained in the recipe components as they apply to process modules
M03100 - SEMI M31 - 300 mmウェーハの搬送および出荷用フロントオープニング・シッピングボックスの機械仕様 StdTpc-Electronic Data Interchange このスタンダードは以下を期待される：NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Silicon Wafer Global Technical Committee200853global Audits and Reviews Subcommittee20086www. semi. org199820073 IC300 mm (front opening shipping Box: FOSB) FOSBFOSB FOSBICFOSBFOUPFOBITICFOSBFOUPFOBIT 5. 4FOSB 5. 4. 1 5. 4. 2
