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保護されるべき資産（装置情報資産）
This edition was approved for publication by the global Audits and Reviews Subcommittee on April 15
It is intended for the benefit of semiconductor device and equipment manufacturers alike so that acquisition
org 에서 이용 가능하다
S02900 - SEMI S29 - Guide for Fluorinated Greenhouse Gas (F-GHG) Emission Characterization and Reduction Revision:SEMI S29-0712 - Inactive 保護されるべき資産（装置情報資産）This Standard was technically approved by the Environmental, Health & Safety Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on June 18, 2012. Available at www. semiviews. org and www. semi. org in July 2012. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are
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