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G09000 - SEMI G90 - Specification for 300 mm Wafer Coin-Stack Type Shipping Container Used for Test and Packaging Processes StdPbc-1113 the procedure described gives the

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Description

the procedure described gives the unconstrained value of sori

1 Docking Interface Port

orgで入手可能となる。初版は1986年発行。前版は1987年発行。

including jigs and some consumable materials

G09000 - SEMI G90 - Specification for 300 mm Wafer Coin-Stack Type Shipping Container Used for Test and Packaging Processes StdPbc-1113 the procedure described gives theThe purpose of this Standard is to standardize the specifications for 300 mm wafer coin stack type shipping container used for test and packaging processes for wafers. This Specification defines the dimensions of container (refer to 5. 1. 1) and requirements for securing the interface between container and processing equipment or wafer transportation equipment. This Standard specifies the requirements for wafer spacers used for separation of wafers

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