E05418 - SEMI E54.18 - Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pump Device Revision:SEMI E54.18-0914 - Superseded One equipment state called the

One equipment state called the unscheduled downtime state (UDT) defines a ‘failed’ condition for an equipment system

E This document was editorially modified in October 2000 to correct a formatting error

本スタンダードは，global Gases Technical Committeeで技術的に承認されている。現版は2011年12月24日，global Audits and Reviews Subcommitteeにて発行が承認された。2012年2月にwww

Specification for Cassettes Used for Horizontal Transport and Storage of Flat Panel Display Substrates

E05418 - SEMI E54.18 - Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pump Device Revision:SEMI E54.18-0914 - Superseded One equipment state called theNOTICE: This Standard is no longer published with the SEMI E54 suite of Standards. It is published and sold separately. 1 Purpose 1. 1 This Specification is part of a suite of Standards which specify the implementation of SEMI Standards for the Sensor Actuator Network. The specific purpose of this Specification is to describe a network independent application model comprised of device objects which are common to all vacuum pump devices (VPD) on a