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A standardized test method for measuring the grain sizes and their distribution is required to establish wafer specifications regarding grain sizes
SEMI D62-0619 (technical revision)
1 This Specification defines metrics and calculations for reporting equipment data quality
is intended to reduce the cost of transporting wafers between IC manufacturing sites
S00200 - SEMI S2 - 半導體製造設備安全衛生及環保基準 StdPbc-0319 A standardized test method forNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. Referenced SEMI Standards (purchase separately) SEMI E6 Guide for Semiconductor Equipment Installation DocumentationSEMI F5 Guide for Gaseous Effluent HandlingSEMI F14 Guide for the Design of Gas Source Equipment EnclosuresSEMI S1 Safety
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