G06700 - SEMI G67 - シート材料から発生する粒子の測定の試験方法 StdPbc-0516 org in July 2016

Name: G06700 - SEMI G67 - シート材料から発生する粒子の測定の試験方法 StdPbc-0516 org in July 2016
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SKU: 63054606854

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Description

org in July 2016

The scope of this Document covers high purity hafnium tert-butoxide which is used in the semiconductor industry for the deposition of hafnium oxide based layers by atomic layer deposition or chemical vapor deposition

SI (System International) units are used throughout

Such conditions are usually configuration specific

G06700 - SEMI G67 - シート材料から発生する粒子の測定の試験方法 StdPbc-0516 org in July 2016global Assembly & Packaging Technical Committee201171global Audits and Reviews Subcommittee20118www. semiviews. org www. semi. org19969200411 : Referenced SEMI Standards None.

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