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SEMI MF374-02 (first SEMI publication)
thickness and surface condition
polycarbonate
本測定は，過剰キャリア密度がウェーハ試料の場合は1 × 1013 cm-3～2 × 1016 cm-3，バルク試料（厚さ1 cm以上）の場合は1 × 1013 cm-3～5 × 1015 cm-3の範囲内で適用できる。
E09800 - SEMI E98 - オブジェクトベース装置モデル（OBEM）暫定スタンダード StdPbc-0320 SEMI MF374-02 (first SEMI publication)Notice: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI E98SEMI E98. 10309 OBEM OBEMSEMI E81 CIM OBEM OBEM 11. 2 14 OBEM SECS IICORBA IDLDCOMOBEM Subordinate Standard: SEMI E98. 1 1102 (Reapproved 0309) SECS II Referenced SEMI Standards SEMI E5 SEMI Equipment Communications Standard 2
