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2 The GEM Standard is intended to specify the following:
5 This Standard presents a solution from the concepts and behavior down to the messaging services
or outgassing
This Standard provides guidance on maintenance
MF161800 - SEMI MF1618 - Practice for Determination of Uniformity of Thin Films on Silicon Wafers Revision:SEMI MF1618-1104 - Superseded 2 The GEM Standard isNOTICE: This Document was reapproved with minor editorial changes. The purpose of this Practice is to promote commonality of approach to the analysis of uniformity among all parties needing to generate or assess such information, including manufacturers of the basic test instrumentation to be used. This Practice is intended for process control, research and development, and process equipment evaluation purposes. It is intended for the benefit of
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