M00100 - SEMI M1 - Specification for Polished Single Crystal Silicon Wafers Revision:SEMI M1-0416 - Superseded SEMI MF1617 — Test Method

SEMI MF1617 — Test Method for Measuring Surface Sodium

To standardize the classification of color breakup for flat panel displays is necessary

The purpose of this Guide is to provide common terminology and definitions that can be used when addressing the quality of semiconductor equipment generated data

3  This Specification does not require that the metadata provided by the equipment be directly human readable

M00100 - SEMI M1 - Specification for Polished Single Crystal Silicon Wafers Revision:SEMI M1-0416 - Superseded SEMI MF1617 — Test Method1 Purpose 1. 1 Single crystal silicon wafers are utilized for essentially all integrated circuits and many other semiconductor devices. To permit common processing equipment to be used in multiple device fabrication lines, it is essential for the wafer dimensions to be standardized. 1. 2 In addition, as technology advances to smaller and smaller dimensions for the elements of high density integrated circuits, it has become of interest to standardize