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P03400 - SEMI P34 - 230mm方形フォトマスク基板の仕様 Revision:SEMI P34-0200 (Reapproved 0707) - Inactive It is envisioned that this

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Description

It is envisioned that this Guide can be used for internal factory and equipment optimization

SEMI M65-0306 (first published)

The wafer alphanumeric code links the properties of the wafer stored in an appropriate database system to each individual wafer for purposes of tracking and control during wafer and device manufacture

本仕様は,global Silicon Wafer Committeeで技術的に承認されている。現版は,2010年8月27日 ,global Audits & Reviews Subcommitteeにて発行が承認された。2010年10月にwww

P03400 - SEMI P34 - 230mm方形フォトマスク基板の仕様 Revision:SEMI P34-0200 (Reapproved 0707) - Inactive It is envisioned that thisNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI global Micropatterning Committee2007425global Audits and Reviews Subcommittee20076www. semi. org20002 NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been

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