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2 Surface scanners
and cassettes and that are manufactured for integration into semiconductor manufacturing equipment
For instance
This edition was approved for publication by the global Audits and Reviews Subcommittee on November 19
M01500 - SEMI M15 - Polished Wafer Defect Limits Table for Semi-Insulating Gallium Arsenide Wafers Revision:SEMI M15-0298 - Inactive 2 Surface scannersThis document defines the maximum number of defects, by type, that an acceptable polished Semi Insulating Gallium Arsenide (GaAs) wafer may exhibit. Referenced SEMI Standards None.
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