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1 mm厚のガラス基板の水平搬送や保管に使用するカセットについて規定する。
associated with its use
This Specification is intended to provide specifications for the criteria necessary to use for growth of films suitable for device production
org in November 2004
E08800 - SEMI E88 - AMHS保管SEM（ストッカーSEM）の仕様 Revision:SEMI E88-0307 (Reapproved 0612) - Superseded 1 mm厚のガラス基板の水平搬送や保管に使用するカセットについて規定する。global Information & Control Technical Committee2012221global Audits and Reviews Subcommittee20126www. semiviews. org www. semi. org199920073 : AMHSSEMSEMSEMI E30SEMSEM[SEMI E23] AMHSGEM13SEMI2SECS IISECSSC GEM13SEMGEM Referenced SEMI Standards SEMI E4 SEMI Equipment Communications Standard 1 Message Transfer (SECS I) SEMI E5 SEMI Equipment Communications Standard 2 Message Content (SECS II) SEMI E23 Specification for Cassette Transfer Parallel I O
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