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本文書が対象とするステンレス製容器は、薬液を導出もしくは導入するチューブ有しており、そのチューブが容器内部に貫通しているものである。
2-0211 (technical revision)
This Standard also provides a guide for a grade of nitric acid for which a need has been identified
in some cases growing to many tens of gigabytes
MS00600 - SEMI MS6 - Guide for Design and Materials for Interfacing Microfluidic Systems StdPbc-1114 本文書が対象とするステンレス製容器は、薬液を導出もしくは導入するチューブ有しており、そのチューブが容器内部に貫通しているものである。This standard was technically approved by the global MEMS Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on December 20, 2007. It was available at www. semi. org in February 2008. This document provides guidelines for general fluidic interface design and materials selection that can reduce redundant engineering effort and lead to improved design, manufacturability, and operation. Referenced SEMI
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