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D01100 - SEMI D11 - Specification for Flat Panel Display Glass Substrate Cassettes Lang-Korean and devices for wafers thatThis Standard was technically approved by the Flat Panel Display Factory Automation Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 13, 2009. Available at www. semi. org in July 2009; originally published in 1995; previously published July 2003. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met.
