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SEMI MF1771-0304 (technical revision)
relationships
SEMI E4-80 (first published)
The configuration of unit designs should be made per the IC chip information
E03500 - SEMI E35 - Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment StdPbc-0813 SEMI MF1771-0304 (technical revision)The purpose of this Guide is to provide standard cost of ownership (COO) metrics for evaluating unit production cost effectiveness of manufacturing equipment in the semiconductor and related industries. This Guide establishes a procedure to facilitate an understanding of equipment related costs, including costs related to environmental, health, and safety (EHS) factors, by providing definitions, classifications, algorithms, methods, and example values
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