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SEMI E111-1104 (technical revision)
The width of the denuded zone (DZ) free of bulk micro defects (BMD) is also an important parameter
SEMI G9 — Specification for Stamped Leadframes for Plastic Molded Dual-in-Line Semiconductor Packages
This includes the interface data descriptions (inputs and outputs)
M00800 - SEMI M8 - Specification for Polished Monocrystalline Silicon Test Wafers Revision:SEMI M8-0306 - Superseded SEMI E111-1104 (technical revision)This Specification covers dimensional and crystallographic properties of monocrystalline virgin silicon test wafers together with selected electrical and surface defect characteristics. This Specification covers virgin test wafers in all standard wafer diameters from 2 inch to 300 mm. It classifies test wafers according to the items specified. It provides three classes of smaller diameter test wafers (through 125 mm), and two classes of larger
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