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C00327 - SEMI C3.27 - 三フッ化ホウ素(BF3),シリンダ充填, 99.0%品質の仕様 StdTpc-Statistical Control SEMI E46-95 (first published)

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Description

SEMI E46-95 (first published)

This Specification is appended with related information to provide application examples

HSMS는 독립적인 제조업체들이 서로에 대한 특정한 지식 없이도 연계하여 상호 운영(interoperate) 하여 생산활동을 할 수 있는 방법을 제공한다

Characteristic parameters of these defects are part of wafer specifications (SEMI PV22)

C00327 - SEMI C3.27 - 三フッ化ホウ素(BF3),シリンダ充填, 99.0%品質の仕様 StdTpc-Statistical Control SEMI E46-95 (first published)global Gases Technical Committee2011912global Audits and Reviews Subcommittee201110www. semiviews. org www. semi. org1984200211 : (Si2H6) Referenced SEMI Standards SEMI C1 Specifications for Reagents SEMI C3 Specifications for Gases

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