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SEMI C28-0705 (technical revision)
6-0710 (technical revision)
The scope of this Document covers high purity zirconium amides
the pressure will remain fairly constant
C00603 - SEMI C6.3 - Particle Specification for Grade 20/0.2 Hydrogen (H2) Delivered as Pipeline Gas StdPbc-0709 SEMI C28-0705 (technical revision)This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on September 12, 2011. Available at www. semiviews. org and www. semi. org in November 2011; originally published in 1989; previously published March 2003. NOTICE: This Document is no longer supported by the global technical committee. It has been replaced by SEMI C97. The purposes of
