E10200 - SEMI E102 - Provisional Specification for CIM Framework Material Transport and Storage Component Revision:SEMI E102-0600 (Reapproved 0706) - Inactive This edition was approved for

This edition was approved for publication by the global Audits and Reviews Subcommittee on October 17

SEMI E120-0922 (Reapproved 0823)

This Test Method outlines the principles of eddy-current measurements as they relate to semiconductor substrates and certain thin films fabricated on such substrates as well as requirements for setting up and calibrating such instruments for use particularly at a buyer-seller interface

including polished wafers as well as substrates for epitaxial and certain other kinds of silicon wafers

E10200 - SEMI E102 - Provisional Specification for CIM Framework Material Transport and Storage Component Revision:SEMI E102-0600 (Reapproved 0706) - Inactive This edition was approved forThis provisional specification was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on May 16, 2006. It was available at www. semi. org in June 2006. Originally published June 2000. The purpose of this standard is to specify these interfaces and the interactions between MES and AMHS systems as a part of the CIM Framework. While the term AMHS is