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Volume and surface resistivity (see SEMI G75
Inspection equipment finds anomalies
シリコンエピタキシャルウェーハの中には，エピタキシャル層の下に埋め込み層が形成されているものがある。 本仕様はそのような埋め込み層付きのエピタキシャルウェーハの特性について規定するものである。
SEMI E169-0615 (technical revision)
S00300 - SEMI S3 - Safety Guideline for Process Liquid Heating Systems Revision:SEMI S3-0306 - Superseded Volume and surface resistivity (seeThis Safety Guideline was technically approved by the Environmental Health & Safety Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2017. Available at www. semiviews. org and www. semi. org in October 2017; originally published in 1991; previously published December 2011. E This Standard was editorially modified in make corrections that were approved outside of the normal
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