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SEMI C21-0699 (first published)
reference datum
装置上，ならびに装置外部でのレシピの管理
Film deposition equipment (chemical vapor deposition [CVD] and physical vapor deposition [PVD])
S02200 - SEMI S22 - Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment Revision:SEMI S22-1110 - Superseded SEMI C21-0699 (first published)This Safety Guideline provides a set of design based electrical safety considerations for production equipment used in the semiconductor industry. Basic product safety concerns are addressed by satisfying the design, construction, and testing principles set in this Safety Guideline for protection against electrical shock or fire risk. The intent is to provide a design based electrical document that will be useful to both design engineers and
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