P01400 - SEMI P14 - Determination of Tin in Positive Photoresists by Graphite Furnace Atomic Absorption Spectroscopy Lang-Japanese SEMI P28 — Specification for

SEMI P28 — Specification for Overlay-Metrology Test Patterns for Integrated-Circuit Manufacture

This Standard was technically approved by the HB-LED Global Technical Committee

and behavior

SEMI E147 — Guide for Equipment Data Acquisition (EDA)

P01400 - SEMI P14 - Determination of Tin in Positive Photoresists by Graphite Furnace Atomic Absorption Spectroscopy Lang-Japanese SEMI P28 — Specification forNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This procedure is a graphite furnace atomic absorption analytical method for tin in photoresist. The applicable concentration range is 0. 1 to 1 ppm when the sample is diluted one to ten. The precision was found to be