S02100 - SEMI S21 - 人員防護安全基準 Revision:SEMI S21-1106E - Superseded SEMI MF28-0317E (Reapproved 0622)

SEMI MF28-0317E (Reapproved 0622)

threaded seals are beyond the scope of this Document

The PSFQR or PSFQD metric is suitable for quantifying near edge geometry when applying a site pattern that appropriately covers large parts of the wafer edge

and other methods of measuring static charge as well as the performance parameters of static-control methods

S02100 - SEMI S21 - 人員防護安全基準 Revision:SEMI S21-1106E - Superseded SEMI MF28-0317E (Reapproved 0622)FPD This safety guideline was technically approved by the global Environmental Health & Safety Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on August 24, 2006. It was available at www. semi. org in October 2006. Originally published October 2003. E This standard was editorially modified in February 2007 to correct an error. Changes were made to 7. 2. 3. This safety guideline identifies preferred